| Technical specifications |
| Measuring system |
Skidless/Skidded method using inductive (LVDT) Pick-Up |
| |
with interchangeable styli |
| Measurement parameter |
Ra, Rz, tp, Sm, Rt, Rp, Rv, Pc, HSC, Ra/RMS, RmaxD, R3Z, |
| |
Rmax, RSm, Rmr(c), Rdc, Rsk, Rku, Rk, Mr1, Mr2, Rpk, Rvk, |
| |
A1, A2, Pa, Pz, Pp, Pv, Pq, RSm, Pmr(c), Pdc, Pt, Pak, Pku, |
| |
Wa, Wz, Wp, Wv, Wq, Wsm, Wmr(c), Wdc, Wt, BAC, |
| |
ADC, P/R/W profile |
| Display |
Touch screen LCD |
| Filter |
Gauss, 2RC, ISO13565-1 (DIN4776), special Gauss |
| Profile |
Un-filtered, filtered (roughness), filtered (centerline) waviness |
| Cut-off |
lc0.08, 0.25, 0.8, 2.5, R+W |
| |
lsISO3274(96) / ISO97 |
| |
lc-lf0.08-0.8, 0.25-0.5, 0.8-8mm |
| Measuring length |
30mm |
| Evalutation length |
lc x 1, 2, 3, 4, 5 / arbitraty 0.08~16mm |
| Vertical magnification |
50~100000 (11 steps) / Auto |
| Horizontal magnification |
1~1000 (10 steps), 25mm/llc, 50mm/lc |
| Straightness accuracy |
0.3µm / 30mm |
| Measuring range/resolution |
800µm / 0.0005µm |
| Stylus/skid |
R2µm Diamond / R40mm Sapphire |
| Force |
0.7mN |
| Function |
Leveling support, Multi standard analysis, Touch panel, |
| |
99 data SPC, PC linking software |
| Memory |
2 sets of data (optional: 16 sets of measurement conditions) |
| Data output |
RS-232C |
| Power Supply |
Ni-H battery pack, 100 - 240 V with AC adapter |
| Weight |
Amplifier 4.5kg, Drive unit 0.9kg |
