| Technical specifications |
| Accuracy |
Z : 0.1%/5mm, X : 0.2%/5mm |
| Measuring range |
Z: 50mm, X:100mm |
| Resolution |
0.1µm in X axis |
| Display magnification |
1 to 200x in both Z and X axis (up to 2.000 times optional) |
| Drive speed |
0.02mm to 5mm/s at measuring, |
| |
0.02mm to 10mm/s at returning |
| Straightness accuracy |
1µm/100mm |
| Pick up |
Stylus R25µm, tungsten carbide |
| Measuring force |
10mN to 30mN (adjustable) |
| Traceable angle |
Ascend: 77 degrees (smooth surface), descend: 87 degrees |
| Measuring direction |
Both upward and downward, both forward and backward |
| Pick up/down range |
200mm manual (EF-150ED: 200mm motorized) |
| Dimensions measuring part |
640mm x 685mm x 315mm, 70kg |
| Dimensions amplifier |
436mm x 387mm x 150mm, 10kg |
| Dimensions PC and printer part |
650mm x 500mm x 550mm, 30kg for reference |
| Operation conditions |
10°C to 30°C / 80% or less |
| Power supply |
AC100V 50/60Hz 500VA including 300VA |
| |
for PC and printer |
| Data correct functions |
Alignment function (data point movement, rotation, reverse), linkage
function, stylus curvature radius correction, stylus arm arc error
correction, best fit function |
| Analysis items |
Element analysis (point, line, circle, peak, trough, cross point,
cross line, contact point), scaler analysis (coodination distance,
cross angle, distance, radius), ball screw analysis, master comparison
analysis, inspherical surface analysis |
| Measuring support functions |
Macro function, auto measuring function |
| Auxiliary functions |
Free layout edit, vibrator, measuring range limitation, overload
stop, up/downward measuring, over scale warning |
